Micro-CT/nano-CT test patterns

Mizutani Laboratory

Dept of Applied Biochemistry, School of Engineering, Tokai University

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Three-dimensional test patterns for micro-CT and nano-CT

In order to estimate the spatial resolution of 3D images taken with microtomography (micro-CT) or nanotomography (nano-CT), we use test objects on the submicrometer to nanometer scale prepared by focused-ion-beam milling (FIB). The resolutions along the direction within the tomographic slice plane (in-plane or transverse resolution) and perpendicular to it (through-plane or sagittal resolution) can be determined from their square-wave patterns. The aluminum test patterns are labile in the air when it's stored for a long period, such as over one year. If possible, they should rather be stored in a vacuum chamber.

Micrometer to submicrometer patterns

Test pattern 080425AL

snapshot Material: aluminum wire, 0.25 mm diameter.
Pattern pitches: 2.0, 1.6, 1.2, 1.0, 0.8, 0.6, 0.5, 0.4, 0.3, 0.2 um.
Resin embedded.

Test pattern 080604D1

snapshot Material: diamond, ca. 0.15 mm crystal.
Pattern pitches: 2.0, 1.6, 1.2, 1.0, 0.8, 0.6 um. In-plane only.

Nanometer patterns

Test pattern 130315AL

snapshot Material: aluminum rod, ca. 0.12 mm square.
Pattern pitches: 2.0, 1.0, 0.5, 0.40, 0.35, 0.30, 0.25, 0.20 um, 180, 160, 140, 120, 100, 90, 80 nm.

Test pattern 130524AL

snapshot Material: aluminum wire, 0.10 mm diameter.
Pattern pitches: 2.0, 1.0, 0.5, 0.40, 0.35, 0.30, 0.25, 0.20 um, 180, 160, 140, 120, 100, 90, 80 nm.

References

R. Mizutani, A. Takeuchi, R.Y. Osamura, S. Takekoshi, K. Uesugi and Y. Suzuki (2010). Submicrometer tomographic resolution examined using a micro-fabricated test object. Micron 41(1), 90-95. DOI PubMed arXiv
R. Mizutani, K. Taguchi, A. Takeuchi, K. Uesugi and Y. Suzuki (2010). Estimation of presampling modulation transfer function in synchrotron radiation microtomography. Nuclear Instrum. Meth. A 621(1-3), 615-619. DOI arXiv

Document

A PDF document of these test patterns is here. You can find close-ups of the test patterns in it.

Contact

If you would like to use these test patterns at SPring-8, please contact:

Ryuta Mizutani, Dr.
Department of Applied Biochemistry, Tokai University
Kitakaname 4-1-1, Hiratsuka, Kanagawa 259-1292, Japan
E-mail mizutanilaboratory(at)gmail.com

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MizutaniLab - Dept of Applied Biochemistry - Sch of Engineering [jpn] - Tokai Univ